Solmates
PLD Production Platform
產品介紹

 PLD Production Platform

SIP-1200 PLD platform for stable thin film manufacturing

  • PLD production system
  • Substrate size up to 8 inch
  • Multiple processes
  • Stable and reliable operation
  • Low cost of ownership

Process

  • TCO's (ITO, AZO)
  • Optical layers (Al2O3, ZnO, ZrO2)
  • Nitrides (TiN)
  • Active layers (PZT)

Enhanced optical coatings

  • Tunable refractive index
  • Textured porous thin films
  • Refractive index grading
  • In situ V-coat deposition
  • Low temperature processing (ITO, Al2O3, ZrO2), damage-free
  • Wide choice of materials